Energy Dispersive Spectroscopy Equipement

Scanning Electron Microscopy (SEM) and
X-ray Energy Dispersive Spectroscopy

1. Instrument

Scanning Electron Microscopy (SEM), Model 501, Philips - Holland with EDAX and EBIC attachments.

* The scanning electron microscope (SEM) is used for imaging of surfaces and analysis of small surface features. It provides magnifications of up to 240,000 and high spatial resolution (Guaranteed 6 nm in the secondary electron mode, Al-Au-sputtered specimen).
* Completely PC control upgrade by WinDISS card and software from Pointelectronic GmbH: mesurements of distances, angles, areas, etc. Output files in BMP and TIFF formants.
* High tension accelerating voltage continuously variable from 1.6 kV to 30 kV.
* Dynamic focus
* Scan coils control: of scan rotation, tilt correction and magnification
* Contrast enhancement via electronic image signal differentiation and gamma correction.
* High resolution 7” picture monitor + Polaroid camera.
* TV output for videotape (CCIR B&W) or second monitor.
* Two eucentric Goniometer free working distances: 34 mm (normal working distance) and 12 mm (high resolution working distance)
* 64 pin electrical vacuum feedthrough for electron beam induced current (EBIC) inspection of microelectronic devices or other biasing techniques.

The SEM is operated in several modes:

1. Secondary electrons (SE) for topographical imaging.

2. Backscattered electrons (BE) for phase and chemical compositional imaging.

3. Electron beam induced current (EBIC) for defect analysis in semiconductor devices.

4. Energy dispersive x-ray spectroscopy (EDXS)- for chemical elemental analysis.

With SEM a topographical picture (SE) of the surface can be obtained together with a phase chemical (BE) composition picture and elemental chemical (EDXS) analysis mapping at selected points on the surface. These features help to elucidate different problems in R&D of new materials and devices, process and quality control, failure analysis, etc.

Fig. 1 Cross section picture taken from an IC with an "old" Philips 501 SEM (W- electron source) @ 50,000X Magnification and WinDISS Digital System at El-Sol Laboratories, Natanya, Israel.

Fig. 1 Cross section picture taken from an IC with an "old" Philips 501 SEM (W- electron source) @ 50,000X Magnification and WinDISS Digital System at El-Sol Laboratories, Natanya, Israel.

Energy Dispersive Spectroscopy Equipement

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