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El-Sol Technologies
Ltd.
P.O.Box 2699, Natanya 42126
ISRAEL
Tel: +972 4 624 70 33
Fax: +972 4 624 70 23
e-mail: elsolab@actcom.co.il | |
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| SURFACE ANALYSES =>
SYSTEMS =>SAGE 300 | |
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The SAGE 300 System
Modular 12" ESCA inspection system
Sage 300 is a new, compact ESCA system developed from the basic concept of
the SAGE 100. SAGE 300 is a system for fully automated qualitative and
quantitative routine ESCA analysis of up to 12" wafers. It is dedicated to
quality control applications.
- Fully automated qualitative and quantitative routine analysis of up to 12"
wafers (using ESCA - Electron Spectroscopy for Chemical Analysis)
- Complete automated measurement and data acquisition and customized data
treatment based on VACOS (Vacuum and Acquisition Core System) controlled by SpecsCtrl
and using the data acquisition program SpecsLab.
- Measurability of all wafer positions is guaranteed
- High inspection efficiency due to fast wafer load cycles and rapid data
acquisition
- Very robust and fault tolerant operation, "easy to use" graphical
interface
- Full remote control and service capability via internet
Free SAGE Instruction and Demonstration VIDEO!
Please order your FREE copy of a video that describes the most
important features of the SAGE system, and illustrates how easy the system is to
use for routine analysis.
The application features are:
- Control of wafer surface composition between different processing steps,
e.g. after pretreatment
- Depth profiling of chemical concentration profiles
- Determination of layer thickness after various treatment steps, e.g.
capping layers
- General quality control in microelectronic production lines
Other applications:
- Adhesion problems on surfaces
- Surface state control of metallic, plastic or glass surfaces
The main features are:
| quality control, product engineering,
environmental studies and routine tasks in the field of surface
analysis |
| compact design and flexibility, modular design
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| easy to operate |
full computerized operating of :
- vacuum control
- sample handling
- data aquisition
- data processing via predefined routines
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via
VACOS
(Vacuum and Acquisition Core System)
and
SpecsLab
(Data Acquisition
Software) |
| Operates with our standard X-Ray Source RQ
20/38 C |
Performance Data
| Methode |
Excitation |
Line |
Signal (cps) |
Note |
XPS
dE=const. |
Mg 300 W |
Ag 3d 5/2 |
200.000 |
FWHM
1.00 eV |
To obtain further information, please contact us at elsolab@actcom.co.il.
| | HOME
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| SURFACE ANALYSES =>
SYSTEMS =>SAGE 300 | |
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